3 torr in the reaction chamber and a wafer surface temperature of 615°C. The model is defined for the system and process of deposition of silane in an industrial LPCVD system, a SEMATECH BTU Bruce, to exact physical scale. To initialize a model in Fluent, as in most finite-element software, geometric structure, boundary conditions, characteristic of the materials and implied equations must be defined.
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enoonAt last, we must choose a method of analysis for the whole processI t