The effects of different temperatures and pressures on the rate of deposition of and uniformity of coating of layers of polysilicon on wafers of silicon when injecting gas through two common inlets are investigated. The system is modeled by finite element software, and the results of simulations are harvested by the Computational Fluid Dynamics (CFD) tool of the software, and based on real scale of SEMATECH BTU Bruce horizontal hot-wall LPCVD system. Characteristics of materials, boundary conditions and applied physical and chemical equations are initial factors of the model.
New words, one handy idiom, and a 2-minute quiz — delivered to your inbox to keep your streak alive.
enoonYou lost me at the bit in red.Why? You meant it is too long?
enoon I hope the first sentence says what you want it to.
enoonThe first one.You meant this: The effects of different temperatures and pressures on the rate of deposition of and uniformity of coating of layers of polysilicon on wafers of silicon when injecting gas through two common inlets are investigated.