Do you suggest any alternative ? This paper investigates t he effects of temperature and pressure on the d eposition rate and coating uniformity of polysilicon layers on wafers of silicon when injecting gas through two common inlets. The system is modeled by finite element software, and the simulation results, based on the real-world dimensions of the SEMATECH/BTU Bruce horizontal hot-wall LPCVD system, are harvested by the Computational Fluid Dynamics (CFD) tool of that software.
New words, one handy idiom, and a 2-minute quiz — delivered to your inbox to keep your streak alive.
Mister Micawberturgid writers.