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USF Posted 14 years ago
Essay & Composition Writing
Could you please check this for me, as if it is good English or not?
"The last part that must define for the simulation is chemical equations that applied to major reactions happening in the reaction chamber. Two effective reactions are considered in the process of deposition. (Figure v.) Side reactions in an evacuated chamber are not considerable, so other reactions in this simulation are omitted.
(1) A
(2) B
In the reaction (1), Silane is decomposed to SiH2 (Silylene) and hydrogen. This reaction performs in gas phase and as result, Silylene and hydrogen release in gas phase. In the reaction (2), Silylene reacts on the surface of the wafer and decomposes to silicon and hydrogen. During this reaction, polycrystalline of silicon take form on the surface of substrates. Activation energy for the first reaction is about 1.7 KJ/mol, and reaction (2) has very low activation energy. Poly-silicon Grow Rate is related to reaction parameters by Arrhenius equation:
X
"
"The last part that must define for the simulation is chemical equations that applied to major reactions happening in the reaction chamber. Two effective reactions are considered in the process of deposition. (Figure v.) Side reactions in an evacuated chamber are not considerable, so other reactions in this simulation are omitted.
(1) A
(2) B
In the reaction (1), Silane is decomposed to SiH2 (Silylene) and hydrogen. This reaction performs in gas phase and as result, Silylene and hydrogen release in gas phase. In the reaction (2), Silylene reacts on the surface of the wafer and decomposes to silicon and hydrogen. During this reaction, polycrystalline of silicon take form on the surface of substrates. Activation energy for the first reaction is about 1.7 KJ/mol, and reaction (2) has very low activation energy. Poly-silicon Grow Rate is related to reaction parameters by Arrhenius equation:
X
"
Top answer
The last part that must be defined for the simulation is the chemical equations that apply to the major reactions occurring in the reaction chamber. Two effective reactions are considered in the process of deposition (Figure v. ).
- The last part that must be defined for the simulation is the chemical equations that apply to the major reactions occurring in the reaction chamber.
- Two effective reactions are considered in the process of deposition (Figure v.
- ).
- The peripheral reactions in an evacuated chamber are not considerable, so they are omitted.
- (1) A (2) B In reaction (1), silane is decomposed to SiH2 ( silylene ) and hydrogen , which are released as a gas.
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2 Answers
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The last part that must be defined for the simulation is the chemical equations that apply to the major reactions occurring in the reaction chamber. Two effective reactions are considered in the process of deposition (Figure v.). The peripheral reactions in an evacuated chamber are not considerable, so they are omitted.
(1) A
(2) B
In
(1) A
(2) B
In
00
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